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Engineered to order and standard gas purifiers

UHP Line


The UHP  purifier   line   SERTRONIC ® was developed  for satisfying the requirements of the new semi-conductor industry by use a carefully selected combination of catalysts, reactive products and adsorbent. These purifiers eliminate impurities to a level lower than what is now required by the most advanced technologies.


The performances of the UHP purifiers SERTRONIC ® LINE are optimized by use of the most up-to-date alloys, materials, assembly and fabrication technologies for the ultra pure class.

SELECTION TABLE
OUTLET IMPURITY LEVELS < 5 ppbv

Process Gas

Impurities

Maximum level of impurities at inlet

Process

Model/ Type

H2

O2, H2O, CO, CO2

N2, CH4O, CO, Ar

100 ppm

10 ppm

Catalysis and adsorption

Adsorption cryogénique

Type D

SACC

O2

CH4, H2, H2O, CO2

N2, CnHm

100 ppm

100 ppm

Catalysis and adsorption


Adsorption cryogénique

Type M

SACC

N2, He, Kr, Xe

O2, H2O, H2, CO2

CH4, CO, Ar

100 ppm

10 ppm

Catalysis and adsorption

Adsorption cryogénique

Type C - Type N

SACC

Ar

O2, H2O, CO2

100 ppm

Catalysis and adsorption

Type C

Air

CH4, H2O, Tritium

1 000 ppm

Catalysis and adsorption

Type M -Type MF
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